Project Category: Semiconductor
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Semiconductor test bench
Acquisition electronics and software for a semiconductor test bench
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Process gap measurement
Measuring micro-level gap between wafer and process head
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Wafer loading door for vacuum chamber
Automated wafer cassette loading door for a vacuum chamber
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ZRz Nano-positioning axis
High speed nanopositioning Z / Rz axis
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Chuck for semiconductor metrology system
Design and prototyping of an innovative chuck module with an interesting constraint
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Piezo actuator nano-positioning
Extensive characterization of piezo actuators behavior for nanopositioning applications