Semiconductor equipment
High speed Nano-positioning Z / Rz axis
Problem
A semiconductor equipment manufacturer needed a Z-Theta module positioned directly above the wafer, combining nanometer-level repeatability across all 6 degrees of freedom with high acceleration and minimal settling times. No off-the-shelf solution existed.
Solution
We ran a structured architecture analysis to select the optimal concept and components, then moved through design, prototyping, and rigorous validation, with nanometer-level precision as a non-negotiable constraint at every step. Weekly client reviews ensured full visibility and control throughout.
Result
10 months from blank page to validated prototype. Despite significant upfront uncertainty around feasibility, we met all technical specifications on the first build and handed over complete native files and documentation.