Semiconductor Equipment
Extensive characterization of piezo actuators behavior for nanopositioning applications
Problem
A semiconductor equipment manufacturer needed to understand the true performance boundaries of piezo-actuator driven motion platforms ; specifically, whether they could reliably achieve nanometer-level repeatability and fast settling times.
Solution
To get meaningful data, we built a purpose-designed test bench isolating a single actuator on contactless, friction-free guides, eliminating parasitic forces that would otherwise mask the piezo’s true response. The bench was driven via DSpace, giving us full flexibility, precise control and high-fidelity measurement throughout the characterization campaign.
Result
6 months from blank page to full results delivery. We produced a comprehensive test report documenting the real-world strengths and limitations of piezo actuation technology, giving our client the evidence base they needed to make informed technical decisions.